This report deals with the field of micro-electromechanical systems, or MEMS, a process technology for creating tiny systems that integrate functionalities from different physical domains into one device. They are created using a wide range of techniques that have in common the ability to create structures with micro- and even nanometer accuracies. They range in size from a few microns to millimetres. These devices (or systems) have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale.
MEMS is an extraordinarily interdisciplinary field, combining design, engineering and manufacturing expertise from diverse technical areas including integrated-circuit fabrication technology, mechanical engineering, materials science, electrical engineering, chemistry and chemical engineering, as well as fluid engineering, optics, instrumentation and packaging. The complexity of MEMS is demonstrated by the extensive range of markets and applications that incorporate MEMS devices. They can be found in systems ranging across consumer electronics, automotive, medical, communication and military applications. Current MEMS devices include accelerometers for airbag sensors, microphones, projection-display chips, blood and tyre-pressure sensors, optical switches, labs on chip, biosensors and many other products.
This report introduces the field of MEMS and is divided into four main sections. The first introduces MEMS, its definitions, history, current and potential applications, as well as the state of the MEMS market and issues concerning miniaturisation. The second deals with the fabrication methods of MEMS including photolithography, bulk micromachining, surface micromachining and high-aspect-ratio micromachining. Assembly, system integration and packaging of MEMS devices is also described here. The third section gives an overview of MEMS products. The final section discusses some important trends in MEMS.
Henne van Heeren
EnablingM3 & enablingMNT Netherlands
Dr Ayman el Fatatry
Systems Engineering Innovation Centre, BAE Systems
Patric Salomon
4M2C PATRIC SOLOMON GmbH & enablingMNT Germany